EQUIPMENT FOR THE MANUFACTURE OF THIN FILMS THROUGH THE PROCESS OF SPIN COATING.

The invention relates to an appliance for producing thin films by means of a spin coating method. Standard appliances lack a system for controlling the parameters of the method, which would allow the variables thereof to be continuously monitored, while controlling the safety of the method and the users, and memorise these variables so as to ensure the replicability of the method. The main characteristics of the invention are: the substrate is held by means of a suction pad coupled to the shaft for the transmission of the rotation of the machine, which is activated by a vacuum generating system built into said transmission shaft; the generator is powered by means of an assembly of slip rings with a low level of friction, which also allow the transmission of the signal of the vacuum sensor; a double levelling system comprising a supporting and levelling crown and regulatable supports; and continuous monitoring of the level of vacuum and vibrations.